JPS6337364B2 - - Google Patents

Info

Publication number
JPS6337364B2
JPS6337364B2 JP55078462A JP7846280A JPS6337364B2 JP S6337364 B2 JPS6337364 B2 JP S6337364B2 JP 55078462 A JP55078462 A JP 55078462A JP 7846280 A JP7846280 A JP 7846280A JP S6337364 B2 JPS6337364 B2 JP S6337364B2
Authority
JP
Japan
Prior art keywords
radiation
lens system
auxiliary beam
detectors
incident
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55078462A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5632114A (en
Inventor
Uitekuoeku Sutefuan
Adorufusu Fuaaneru Teodorusu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Koninklijke Philips Electronics NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninklijke Philips Electronics NV filed Critical Koninklijke Philips Electronics NV
Publication of JPS5632114A publication Critical patent/JPS5632114A/ja
Publication of JPS6337364B2 publication Critical patent/JPS6337364B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
    • G03F9/7023—Aligning or positioning in direction perpendicular to substrate surface
    • G03F9/7026—Focusing
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • G03F7/70825—Mounting of individual elements, e.g. mounts, holders or supports

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Automatic Focus Adjustment (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP7846280A 1979-06-12 1980-06-12 Optical image forming system Granted JPS5632114A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NLAANVRAGE7904579,A NL186353C (nl) 1979-06-12 1979-06-12 Inrichting voor het afbeelden van een maskerpatroon op een substraat voorzien van een opto-elektronisch detektiestelsel voor het bepalen van een afwijking tussen het beeldvlak van een projektielenzenstelsel en het substraatvlak.

Publications (2)

Publication Number Publication Date
JPS5632114A JPS5632114A (en) 1981-04-01
JPS6337364B2 true JPS6337364B2 (en]) 1988-07-25

Family

ID=19833337

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7846280A Granted JPS5632114A (en) 1979-06-12 1980-06-12 Optical image forming system

Country Status (7)

Country Link
US (1) US4356392A (en])
JP (1) JPS5632114A (en])
CA (1) CA1139441A (en])
DE (1) DE3021622C2 (en])
FR (1) FR2458830B1 (en])
GB (1) GB2052090B (en])
NL (1) NL186353C (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0632215U (ja) * 1992-10-02 1994-04-26 東洋ゴム工業株式会社 自動車用ウエザストリップ

Families Citing this family (54)

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FR2504281A1 (fr) * 1981-04-16 1982-10-22 Euromask Appareil de projection a dispositif de mise au point
US4443096A (en) * 1981-05-18 1984-04-17 Optimetrix Corporation On machine reticle inspection device
DD159377A1 (de) * 1981-05-28 1983-03-02 Reiner Hesse Anordnung zur positionierung
JPS58113706A (ja) * 1981-12-26 1983-07-06 Nippon Kogaku Kk <Nikon> 水平位置検出装置
US4468565A (en) * 1981-12-31 1984-08-28 International Business Machines Corporation Automatic focus and deflection correction in E-beam system using optical target height measurements
JPS59121932A (ja) * 1982-12-28 1984-07-14 Fujitsu Ltd 自動焦点制御装置
DE3325042A1 (de) * 1983-07-12 1984-02-23 Kodak Ag, 7000 Stuttgart Selbstfokussiervorrichtung
AU575332B2 (en) * 1983-07-29 1988-07-28 Sony Corporation Optical disk pick-up
DE3340646A1 (de) * 1983-11-10 1985-05-23 Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar Verfahren und anordnung zur abstandsdetektion zwischen einem objekt und einem ultraschall-objektiv
JPS60145764A (ja) * 1984-01-10 1985-08-01 Dainippon Screen Mfg Co Ltd 画像走査記録方法
US4742506A (en) * 1984-07-12 1988-05-03 Sony Corporation Tracking error detecting apparatus for an optical head with skew error reduction by using an inclined header portion
GB2162634B (en) * 1984-08-01 1988-03-30 Hamar M R System for measuring position of incidence of laser beam on a continuous cell target with respect to a given point
JPS6174338A (ja) * 1984-09-20 1986-04-16 Hitachi Ltd 縮小投影露光装置およびその方法
JPH0792916B2 (ja) * 1985-02-08 1995-10-09 松下電器産業株式会社 光学記録信号再生方法
US4667090A (en) * 1985-06-10 1987-05-19 The United States Of America As Represented By The Secretary Of The Air Force Synthetic aperture multi-telescope tracker apparatus
JPH0610695B2 (ja) * 1985-06-19 1994-02-09 株式会社日立製作所 焦点合せ方法及びその装置
JPH0660811B2 (ja) * 1985-09-24 1994-08-10 ソニー株式会社 反射型傾き検出素子
NL8600253A (nl) * 1986-02-03 1987-09-01 Philips Nv Optisch afbeeldingssysteem voorzien van een opto-elektronisch fokusfoutdetektiestelsel.
US4956833A (en) * 1986-03-31 1990-09-11 Asahi Kogaku Kogyo Kabushiki Kaisha Objective driving device for an optical disk apparatus
JPS63190334A (ja) * 1987-02-02 1988-08-05 Canon Inc 投影露光方法
JPS63262841A (ja) * 1987-04-21 1988-10-31 Canon Inc 投影露光方法
US5055663A (en) * 1988-06-28 1991-10-08 Asahi Kogaku Kogyo Kabushiki Kaisha Optical scanning system and method for adjusting thereof
DE3834117A1 (de) * 1988-10-07 1990-04-12 Zeiss Carl Fa Koordinatenmessgeraet mit einem optischen tastkopf
US6094268A (en) * 1989-04-21 2000-07-25 Hitachi, Ltd. Projection exposure apparatus and projection exposure method
EP0426866B1 (en) * 1989-04-21 1996-07-10 Hitachi, Ltd. Projection/exposure device and projection/exposure method
JP2960746B2 (ja) * 1990-03-15 1999-10-12 株式会社日立製作所 ビーム照射方法および電子ビーム描画方法とビーム照射装置並びに電子ビーム描画装置
NL9001611A (nl) * 1990-07-16 1992-02-17 Asm Lithography Bv Apparaat voor het afbeelden van een maskerpatroon op een substraat.
JPH0646300B2 (ja) * 1990-07-26 1994-06-15 株式会社東芝 パターン検査装置
DE4131737C2 (de) * 1991-09-24 1997-05-07 Zeiss Carl Fa Autofokus-Anordnung für ein Stereomikroskop
US5266791A (en) * 1991-10-17 1993-11-30 Fuji Photo Optical Co., Ltd. Autofocus binocular stereomicroscope
US5216235A (en) * 1992-04-24 1993-06-01 Amray, Inc. Opto-mechanical automatic focusing system and method
US5298976A (en) * 1992-11-16 1994-03-29 Arie Shahar Method and apparatus for measuring surface distances from a reference plane
KR100300618B1 (ko) 1992-12-25 2001-11-22 오노 시게오 노광방법,노광장치,및그장치를사용하는디바이스제조방법
DE69508228T2 (de) * 1994-06-02 1999-09-23 Koninklijke Philips Electronics N.V., Eindhoven Verfahren zur wiederholten abbildung eines maskenmusters auf einem substrat und vorrichtung zur durchführung des verfahrens
JP3824639B2 (ja) * 1994-08-02 2006-09-20 エイエスエムエル ネザランドズ ベスローテン フエンノートシャップ 基板上にマスクパターンを繰り返し写像する方法
JP2728368B2 (ja) * 1994-09-05 1998-03-18 株式会社 日立製作所 露光方法
DE69709584T2 (de) * 1996-03-04 2002-06-13 Asm Lithography B.V., Veldhoven Lithographisches gerät zur step-und-scan übertragung eines maskenmusters
TW367407B (en) * 1997-12-22 1999-08-21 Asml Netherlands Bv Interferometer system with two wavelengths, and lithographic apparatus provided with such a system
US6160622A (en) * 1997-12-29 2000-12-12 Asm Lithography, B.V. Alignment device and lithographic apparatus comprising such a device
US6417922B1 (en) 1997-12-29 2002-07-09 Asml Netherlands B.V. Alignment device and lithographic apparatus comprising such a device
IL139711A0 (en) 1998-05-15 2002-02-10 Astrazeneca Ab Benzamide derivatives for the treatment of diseases mediated by cytokines
US6137580A (en) * 1998-09-22 2000-10-24 Creo Srl Autofocus system
US6368763B2 (en) 1998-11-23 2002-04-09 U.S. Philips Corporation Method of detecting aberrations of an optical imaging system
US6248486B1 (en) * 1998-11-23 2001-06-19 U.S. Philips Corporation Method of detecting aberrations of an optical imaging system
US6544694B2 (en) 2000-03-03 2003-04-08 Koninklijke Philips Electronics N.V. Method of manufacturing a device by means of a mask phase-shifting mask for use in said method
TW556296B (en) * 2000-12-27 2003-10-01 Koninkl Philips Electronics Nv Method of measuring alignment of a substrate with respect to a reference alignment mark
TW526573B (en) * 2000-12-27 2003-04-01 Koninkl Philips Electronics Nv Method of measuring overlay
DE60239401D1 (de) * 2001-05-18 2011-04-21 Koninkl Philips Electronics Nv Lithographische methode zur erzeugung eines elements
US6987561B2 (en) * 2002-04-24 2006-01-17 Analog Devices, Inc. System and apparatus for testing a micromachined optical device
TWI227814B (en) * 2002-09-20 2005-02-11 Asml Netherlands Bv Alignment system and methods for lithographic systems using at least two wavelengths
US7355675B2 (en) * 2004-12-29 2008-04-08 Asml Netherlands B.V. Method for measuring information about a substrate, and a substrate for use in a lithographic apparatus
FR2883369B1 (fr) * 2005-03-18 2007-06-01 Sagem Dispositif de mesure optique par triangulation optique
US10112258B2 (en) * 2012-03-30 2018-10-30 View, Inc. Coaxial distance measurement via folding of triangulation sensor optics path
CN107450287B (zh) * 2016-05-31 2019-10-25 上海微电子装备（集团）股份有限公司 调焦调平测量装置及方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3037423A (en) * 1957-12-30 1962-06-05 Polaroid Corp Automatic focusing system
US3264935A (en) * 1964-01-06 1966-08-09 Robert W Vose Self-focusing slide projector
US3775012A (en) * 1971-07-07 1973-11-27 El Ab As Means for determining distance
JPS5515685B2 (en]) * 1972-06-30 1980-04-25
BR7608673A (pt) * 1975-12-26 1978-01-03 Seiko Instr & Electronics Processo para medicao optica de uma distancia
NL7706753A (nl) * 1977-03-23 1978-12-22 Philips Nv Inrichting voor het uitlezen van een optische stralingsreflekterende informatiedrager.
JPS5422845A (en) * 1977-07-22 1979-02-21 Toshiba Corp Automatic focusing device
DE2744130A1 (de) * 1977-09-30 1979-04-12 Siemens Ag Vorrichtung zum beruehrungsfreien messen des abstandes einer oberflaeche eines objektes von einer bezugsebene

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0632215U (ja) * 1992-10-02 1994-04-26 東洋ゴム工業株式会社 自動車用ウエザストリップ

Also Published As

Publication number Publication date
GB2052090B (en) 1983-04-13
FR2458830A1 (fr) 1981-01-02
JPS5632114A (en) 1981-04-01
CA1139441A (en) 1983-01-11
NL186353C (nl) 1990-11-01
NL186353B (nl) 1990-06-01
DE3021622A1 (de) 1980-12-18
NL7904579A (nl) 1980-12-16
GB2052090A (en) 1981-01-21
FR2458830B1 (fr) 1988-02-19
DE3021622C2 (de) 1984-01-12
US4356392A (en) 1982-10-26

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